Design of Microcantilever Based Sensor for Detection of Volatile Organic Compounds

Abstract

A MEMS-based volatile organic compound sensor's design is described and presented in this
article. Along with its design and modelling, a Micro-Electro-Mechanical-System (MEMS)
cantilevers with the following dimensions: 250μm in length, 80μm in width, and 2μm in
thickness can be shown here. In this investigation of the properties of deflection, in addition to
the usage of the COMSOL simulator, analytical approaches have also been used. The study and
the simulation both attained at different conclusions, and those conclusions were pronounced to
not be comparable by a similar proportion. Consider utilising acetone, which has excellent
analytic properties, in your testing of Omnicant. When the results of the simulation and the
experiment were observed, the findings of the simulation analysis showed that they were 5.78%
off from what was predicted by the simulation and 10.92% off from what was predicted by the
theoretical study.